Sigma SQC-122c Guía de usuario descargar pdf (Pagina 4)

Table of Contents

Chapter 1 Quick Start

1.0 Introduction................................................................................................1-1

1.1 Thin Film Process Overview........................................................................1-1

1.2 System Connections...................................................................................1-2

1.3 Front Panel................................................................................................1-3

1.4 Rear Panel ................................................................................................1-4

1.5 Installation.................................................................................................1-5

1.6 Process Setup ...........................................................................................1-6

1.7 Depositing a Film .......................................................................................1-8

Chapter 2 Operation

2.0 Introduction................................................................................................2-1

2.1 Definitions..................................................................................................2-1

2.2 Defining a Film...........................................................................................2-1

2.3 Defining a Process.....................................................................................2-5

2.4 Sensor Setup.............................................................................................2-7

2.5 Source Setup.............................................................................................2-10

2.6 Running a Process.....................................................................................2-11

2.7 Loop Tuning...............................................................................................2-15

2.8 Troubleshooting .........................................................................................2-17

Chapter 3 Menus

3.0 Introduction................................................................................................3-1

3.1 Main Menu.................................................................................................3-2

3.2 Next Menus ...............................................................................................3-4

3.3 Quick Setup Menu......................................................................................3-5

3.4 Process Menus ..........................................................................................3-7

3.5 Film Menus................................................................................................3-11

3.6 System Parameters Menu...........................................................................3-18

3.7 I/O Setup...................................................................................................3-21

Chapter 4 Options

4.0 Introduction................................................................................................4-1

4.1 Options Cards............................................................................................4-1

4.2 Full Rack Extender Installation....................................................................4-1

1 2 3 4 5 6 7 8 9 ... 63 64

Sin comentarios

Sigma SQC-122c Guía de usuario Pagina 4